Pedestal heater comes in 4 different standard sizes: 100mm, 200mm, 300mm
Different size and shape can also be manufactured based on customer's specifications
For new heater inquiry, please specify:
- Shape: Rectangular, round, or other
- Size: Length x Length x Thickness, Diameter x Thickness, or other mechanical requirements
3 Zones heater with 3 embedded T.Cs 25" diameter and 0.75" thick
300mm Heater
200mm Square Heater
Standard Option 2: Heating Element and Sensing Element
Different types of heating and sensing elements are utilized to meet your application needs:
Tubular heater with 0.250" - 375" diameters.
Flexible mineral insulated cable with diameter ranges from 0.062" to 0.188"
Thermocouple and RTD can be embedded inside for monitoring and controlling power output per zone.
For new heater inquiry, please specify
Wattage
Operating voltage
Number of heating elements or zone, number of sensing elements
Operating temperature and max temperature
Thermal uniformity requirement
3 Zones heater with 3 embedded T.Cs 25" diameter and 0.75" thick
300mm Heater
200mm Square Heater
Standard Option 3: Material Selection
Our heaters can be made from different materials. Most common are Aluminum, Stainless Steel and Copper.
Bi-metal heaters can also be manufactured upon request
For new heater inquiry, please specify
- Material: Aluminum, SST, copper, dissimilar metal or other
- Special surface condition: anodizing, grinding, lapping, special coating
Large Aluminum Heater with Anodized surface to improve radiation heat transfer
Heater with both Copper and SST
Standard Option 4: Termination
Common termination includes:
Teflon or polyimide Lead wire
Torr tube for vacuum seal
Riser
Combination of bellow, bimetal and Torr tube
Large Aluminum Heater with Anodized surface to improve radiation heat transfer
Heater with both Copper and SST
Heater with both Copper and SST
Special Options
Special options include but not limited to:
Embedded cooling channel
Embedded Gas line
Using PyrAlloy (aka TPG or thermal pyrolytic graphite) to improve thermal uniformity
We assist with your design as well as Build to Print
Thermal Modeling available
Large Aluminum Heater with Anodized surface to improve radiation heat transfer
Heater with both Copper and SST
Heater with both Copper and SST
Inquiry Part Number
Therm-x Extended Capability for Heater
Simulation:
- Using COMSOL Multiphysics® and Autodesk Nastran, each design will be simulated to predict both thermal and mechanical behavior
Testing:
- Designated vacuum chamber with thermal image, thermocouple wafer and optical sensing can be used to verify performance of each heater
Calibration lab:
- In-house calibration lab ensures all sensing elements are within tolerance
Quality control:
- Fully equipped electrical testing room to ensure all electrical requirements are met i.e. GFI, leakage, resistance...
- Statistical process control software (JMP®) is utilized to ensure each manufacturing process is within its control limit
- Multiple coordinated measuring machine (CMM) can be used to ensure all mechanical dimensions are met
Furnace and multi axis machine:
- Vacuum and Hydrogen furnaces for brazing
- Multi axis CNC machines that can create complex geometry parts.
- Automatic MIG welding machine for high repeatable weld
Custom vacuum feedthrough:
- Ceramic to metal joints for delivering power through a vacuum chamber
- Custom feedthrough for complex chamber
- Bi-Metal material to connect dissimilar metals
Thermal Behavior and Thermal Stress can be predicted using COMSOL Multiphysics®
Thermal Uniformity of a Heater
Thermal Stress of a Heater
Vacuum Test Chamber
Test chambers enable validation and performance of heaters in simulated process. Various gases, environments and process variables are used to simulate actual process.
Validation and Test services:
Thermal Imaging
Optical sensing
Thermocouple wafer
Hi-Pot at temperature
GFI in process
Performance test
T.C. Wafer and Thermal Imaging
Test chambers enable validation and performance of heaters in simulated process. Various gases, environments and process variables are used to simulate actual process.
Validation and Test services:
Thermal Imaging
Optical sensing
Thermocouple wafer
Hi-Pot at temperature
GFI in process
Performance test
Thermal Image of a 300mm heater
Thermal Uniformity of a Heater using 17 points T.C Wafer Result is analyzed using JMP® software