Heater TYPES

Heater plate Standard Option 1: Size

  • Pedestal heater comes in 4 different standard sizes: 100mm, 200mm, 300mm
  • Different size and shape can also be manufactured based on customer’s specifications
  • For new heater inquiry, please specify:
- Shape: Rectangular, round, or other
- Size: Length x Length x Thickness, Diameter x Thickness, or other mechanical requirements

3 Zones heater with 3 embedded T.Cs 25” diameter and .75” thick

300mm Heater

200mm Square Heater

Standard Option 2: Heating Element and Sensing Element

  • Different types of heating and sensing elements are utilized to meet your application needs:
    • Tubular heater with .250 - 375” diameters.
    • Flexible mineral insulated cable with diameter ranges from .062” to .188”
    • Thermocouple and RTD can be embedded inside for monitoring and controlling power output per zone.
  • For new heater inquiry, please specify
    • Wattage
    • Operating voltage
    • Number of heating elements or zone, number of sensing elements
    • Operating temperature and max temperature
    • Thermal uniformity requirement

3 Zones heater with 3 embedded T.Cs 25” diameter and .75” thick

300mm Heater

200mm Square Heater

Standard Option 3: Material Selection

  • Our heaters can be made from different materials. Most common are Aluminum, Stainless Steel and Copper.
  • Bi-metal heaters can also be manufactured upon request
  • For new heater inquiry, please specify
- Material: Aluminum, SST, copper, dissimilar metal or other
- Special surface condition: anodizing, grinding, lapping, special coating

Large Aluminum Heater with Anodized surface to improve radiation heat transfer

Heater with both Copper and SST

 

Standard Option 4: Termination

Common termination includes:

  • Teflon or polyimide Lead wire
  • Torr tube for vacuum seal
  • Riser
  • Combination of bellow, bimetal and Torr tube

Large Aluminum Heater with Anodized surface to improve radiation heat transfer

Heater with both Copper and SST

Heater with both Copper and SST

 

Special Options

Special options include but not limited to:
  • Embedded cooling channel
  • Embedded Gas line
  • Using PyrAlloy (aka TPG or thermal pyrolytic graphite) to improve thermal uniformity
  • We assist with your design as well as Build to Print
  • Thermal Modeling available

Large Aluminum Heater with Anodized surface to improve radiation heat transfer

Heater with both Copper and SST

Heater with both Copper and SST

Inquiry Part Number

 

Therm-x Extended Capability for Heater

Simulation:
- Using COMSOL Multiphysics® and Autodesk Nastran, each design will be simulated to predict both thermal and mechanical behavior
Testing:
- Designated vacuum chamber with thermal image, thermocouple wafer and optical sensing can be used to verify performance of each heater
Calibration lab:
- In-house calibration lab ensures all sensing elements are within tolerance
Quality control:
- Fully equipped electrical testing room to ensure all electrical requirements are met i.e. GFI, leakage, resistance…
- Statistical process control software (JMP®) is utilized to ensure each manufacturing process is within its control limit
- Multiple coordinated measuring machine (CMM) can be used to ensure all mechanical dimensions are met
Furnace and multi axis machine:
- Vacuum and Hydrogen furnaces for brazing
- Multi axis CNC machines that can create complex geometry parts.
- Automatic MIG welding machine for high repeatable weld
Custom vacuum feedthrough:
- Ceramic to metal joints for delivering power through a vacuum chamber
- Custom feedthrough for complex chamber
- Bi-Metal material to connect dissimilar metals

Thermal Behavior and Thermal Stress can be predicted using COMSOL Multiphysics®

Thermal Uniformity of a Heater

Thermal Stress of a Heater

Vacuum Test Chamber

Test chambers enable validation and performance of heaters in simulated process. Various gases, environments and process variables are used to simulate actual process.

Validation and Test services:

  • Thermal Imaging
  • Optical sensing
  • Thermocouple wafer
  • Hi-Pot at temperature
  • GFI in process
  • Performance test

T.C. Wafer and Thermal Imaging

<p >Test chambers enable validation and performance of heaters in simulated process. Various gases, environments and process variables are used to simulate actual process.

Validation and Test services:

  • Thermal Imaging
  • Optical sensing
  • Thermocouple wafer
  • Hi-Pot at temperature
  • GFI in process
  • Performance test

Thermal Image of a 300mm heater

Thermal Uniformity of a Heater using 17 points T.C Wafer Result is analyzed using JMP® software


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  • Return & Exchange

    You can return or exchange the item within 14 days.
  • Satisfaction Guarantee

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