Pedestal Heaters
Therm-x manufactures brazed heater plates for the semiconductor industry. Use of multiple Mineral insulated heating elements allows for better uniformity and multi-zoning for applications where uniformity can’t be met with traditional single zone tubular heaters.
Vacuum Brazed Heater Pedestal for the Semiconductor industry
- Single or Multi Zone
- Embedded Sensors
- 550°C Operating temperature
- Sapphire or ceramic lift pins
- Aluminum
- Stainless Steel
- Ceramic
- Copper
- Pyralloy (TPG) option for high uniformity
- Thermal Imaging
- Performance test
- High Isolation Resistance