Pedestal Heaters

Therm-x manufactures brazed heater plates for the semiconductor industry. Use of multiple Mineral insulated heating elements allows for better uniformity and multi-zoning for applications where uniformity can’t be met with traditional single zone tubular heaters.


Pedestal heater plate
Vacuum brazed heater

Vacuum Brazed Heater Pedestal for the Semiconductor industry

  • Single or Multi Zone
  • Embedded Sensors
  • 550°C Operating temperature
  • Sapphire or ceramic lift pins
  • Aluminum
  • Stainless Steel
  • Ceramic
  • Copper
  • Pyralloy (TPG) option for high uniformity
  • Thermal Imaging
  • Performance test
  • High Isolation Resistance

Therm-x Manufactures the Following Semiconductor Products

  • Cast in Heaters for Semiconductor Processing
  • Custom Wafer Process Heaters & Heating Elements
  • Semiconductor Heaters
  • Semiconductor Wafer Vacuum Heaters
  • Wafer & Gas Line Heaters
  • Wafer Handling Solutions
  • Water Heaters & Semiconductor Chamber Pedestal Heaters
  • Wafer Processing Heaters
 

  • 510 606-1012

    Round-the-clock free hotline (24/7)
  • Return & Exchange

    You can return or exchange the item within 14 days.
  • Satisfaction Guarantee

    We are committed to your satisfaction with every order.
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