Pedestal Heaters
Therm-x manufactures brazed heater plates for the semiconductor industry. Use of multiple Mineral insulated heating elements allows for better uniformity and multi-zoning for applications where uniformity can’t be met with traditional single zone tubular heaters.
Vacuum Brazed Heater Pedestal for the Semiconductor industry
- Single or Multi Zone
- Embedded Sensors
- 550°C Operating temperature
- Sapphire or ceramic lift pins
- Aluminum
- Stainless Steel
- Ceramic
- Copper
- Pyralloy (TPG) option for high uniformity
- Thermal Imaging
- Performance test
- High Isolation Resistance
Therm-x Manufactures the Following Semiconductor Products
- Cast in Heaters for Semiconductor Processing
- Custom Wafer Process Heaters & Heating Elements
- Semiconductor Heaters
- Semiconductor Wafer Vacuum Heaters
- Wafer & Gas Line Heaters
- Wafer Handling Solutions
- Water Heaters & Semiconductor Chamber Pedestal Heaters
- Wafer Processing Heaters
- HEATER PLATE STANDARD OPTION 1: SIZE
- STANDARD OPTION 2: HEATING ELEMENT AND SENSING ELEMENT
- STANDARD OPTION 3: MATERIAL SELECTION
- STANDARD OPTION 4: TERMINATION
- SPECIAL OPTIONS
- INQUIRY PART NUMBER
- THERM-X EXTENDED CAPABILITY FOR HEATER
- VACUUM TEST CHAMBER
PyrAlloy Uniform Heater Plate
Uniform heat distribution is difficult to achieve at high temperatures using traditional heaters. As an industry leader in advanced temperature and process control systems for hi-tech industries, we have helped clients overcome heat distribution issues by providing them PyrAlloy heater plates. Manufactured from PyrAlloy, a thermal pyrolytic graphite (TPG), these heater plates are proven to perform at high operating temperatures.
