Pedestal Heaters

Therm-x manufactures brazed heater plates for the semiconductor industry. Use of multiple Mineral insulated heating elements allows for better uniformity and multi-zoning for applications where uniformity can’t be met with traditional single zone tubular heaters.


Pedestal heater plate
Vacuum brazed heater

Vacuum Brazed Heater Pedestal for the Semiconductor industry

  • Single or Multi Zone
  • Embedded Sensors
  • 550°C Operating temperature
  • Sapphire or ceramic lift pins
  • Aluminum
  • Stainless Steel
  • Ceramic
  • Copper
  • Pyralloy (TPG) option for high uniformity
  • Thermal Imaging
  • Performance test
  • High Isolation Resistance

Therm-x Manufactures the Following Semiconductor Products

  • Cast in Heaters for Semiconductor Processing
  • Custom Wafer Process Heaters & Heating Elements
  • Semiconductor Heaters
  • Semiconductor Wafer Vacuum Heaters
  • Wafer & Gas Line Heaters
  • Wafer Handling Solutions
  • Water Heaters & Semiconductor Chamber Pedestal Heaters
  • Wafer Processing Heaters
 
Custom Heaters Types and Solutions

  • HEATER PLATE STANDARD OPTION 1: SIZE
  • STANDARD OPTION 2: HEATING ELEMENT AND SENSING ELEMENT
  • STANDARD OPTION 3: MATERIAL SELECTION
  • STANDARD OPTION 4: TERMINATION
  • SPECIAL OPTIONS
  • INQUIRY PART NUMBER
  • THERM-X EXTENDED CAPABILITY FOR HEATER
  • VACUUM TEST CHAMBER

PyrAlloy Uniform Heater Plate

Uniform heat distribution is difficult to achieve at high temperatures using traditional heaters. As an industry leader in advanced temperature and process control systems for hi-tech industries, we have helped clients overcome heat distribution issues by providing them PyrAlloy heater plates. Manufactured from PyrAlloy, a thermal pyrolytic graphite (TPG), these heater plates are proven to perform at high operating temperatures.

PyrAlloy Uniform Heater Plate

  • 510 606-1012

    Round-the-clock free hotline (24/7)
  • Return & Exchange

    You can return or exchange the item within 14 days.
  • Satisfaction Guarantee

    We are committed to your satisfaction with every order.
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